Professor Ren Tianling from the Department of Microelectronics, Tsinghua University published a high-sensitivity and wide linear range graphene pressure sensor entitled "Bionic Acupuncture Random Distribution Structure" at the ACS Nano (Epidermis Microstructure Inspired Graphene Pressure) Sensor with Random Distributed Spinosum for High Sensitivity and Large Linearity), based on the human skin perception microstructure, proposes a similar biomimetic structure, and solves the contradiction between sensitivity and linear range through the combination of microstructure and distribution mode. A comprehensive upgrade of device performance provides a new way of thinking.
In recent years, flexible mechanical micro-nano sensors have become a research hotspot in the field of human physiological information monitoring and detection, and a large number of related industry companies have been established. Compared with traditional silicon-based devices, it is widely used in the monitoring of human physical and chemical activities due to its characteristics of comfort, fit and wearability, but as two important indicators of mechanical devices, sensitivity and linearity. The contradiction has not been well resolved. Usually prepared devices need to sacrifice another indicator to serve another index, which often limits the scope of its practical application, and it is difficult to solve this contradiction.
(top to bottom, left to right) microscopic schematic of the skin, skin microstructure and biomimetic structure photos, linearity and sensitivity compared with previous work performance, wrist pulse and respiratory monitoring results.
Ren Tianling's research group based on human skin, especially the high sensitivity response of fingertips to different stresses, proposed the preparation of similar structures based on the study of its microstructure. The sandpaper was used as a template to mold the flexible substrate, and the graphene was reduced at high temperature to be used as a mechanically sensitive layer to prepare a pressure sensor with a needle shape and random distribution. The sensor exhibits excellent stability, fast response and low detection limits, enabling high sensitivity over a wider linear measurement range. Among them, the sudden change of contact area between the acupuncture structures mainly contributes to high sensitivity, and the random distribution mainly contributes to a wide linear range, and the combination of the two largely solves the contradiction.
Due to the high sensitivity and wide linear range of the sensor, the research group has successfully applied to the monitoring of various physiological activities of the human body, such as pulse, breathing and voice recognition, as well as monitoring the walking postures such as walking, running and jumping. And monitoring of walking gait. The use of wearable high-performance mechanical sensors to acquire various physiological activity parameters of the human body will have important practical significance in personal health and medical care, and has great application prospects.
The research results were supported by the National Natural Science Foundation's key projects and the Ministry of Science and Technology.
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